EG 2001 Specs
EG 2001 Spec Sheet(Typical)
| Accuracy | within 12 Microns / 0.5 mil (± 6 microns) | |
| Wafer Size | 3,4,5, and 6, inch | |
| Maximum X/Y Speed | 250 mm (10″) / sec. | |
| Z Stage/Chuck | ||
| Range | 0.200 “ | |
| Speed | 15 ms / 0.020″ stroke | |
| Rotation | ± 10º | |
| Loader (wafer handler) | ||
| Cassette Capacity | 2 standard; 1 sender, 1 receiver | |
| Wafer handling | belt & vacuum arm | |
| Fine Alignment | CCD image processing | |
| Hard Disk Drive | N/A | |
| Floppy Disk Drive | optional 3.5″; 2 drives | |
| Display | 9″ B & W | |
| Power Consumption | Approx 1.5 KVA | |
| Facilities Required | ||
| Air | 75 PSI @ 3 cfm. | |
| Vacuum | 25 in/hg. | |
| Dimensions | 48″w x 32″ D x 60″ H; standard “high” configuration | |
| Weight | 800 lbs. |