Hot & Cold Chuck System

Test at Temperature, Thermal Wafer Chucks

AirCool®3 modular chuck system

ERS

Offering cold temperature test with a minimum footprint and air-only reliability.

  • No liquids or Peltier elements used for cooling
  • Modular System, compatible through all upgrade options
  • Temperature ranges from
    -65°C to +400°C

PowerSense® chuck system

ERS

Extremely fast removal of heat added to the device under test to hold the target temperature.

  • Up to 5000W energy dissipation
  • Most efficient heat transfer
  • Temperature ranges from
    -55 to +200 °C

WaferTherm® chuck system

ERS

A liquid-cooled system providing the high precision necessary for LCD test.

  • 0.01 °C temperature step precision
  • Liquid-cooled Peltier chuck system
  • Temperature ranges from
    -55 to +150 °C


Why to choose an ERS chuck system?

As a quality and technology market leader ERS has a clear statement for product features: Uncompromised excellence in all disciplines.