SEMICS Opus3 Spec Sheet

Model: OPUS3

6″, 8″ & 12″ Wafer Prober

Features:

1) Smart Probe card Alignment (SPA) Mechanism
2) Intelligent Overdrive Control
3) 6″, 8″ & 12″ Wafers without Mechanical Changeover
4) Superior Tri-Temp. Control (Cold / Ambient / Hot)
5) Flat Top for Large Test Head
6) Easy On-Site Calibration
7) Fast Index / Less Vibration
8) Fastest & Simplest Auto Card Changer
9) Fast Linear Motor Control for XY Stage
10) Z-Down Control at the Time of Power-Down
11) 200×100 Needle Cleaner
12) CCD Camera Cassette Mapping for Thin Wafers
13) High-Performance OCR
14) SECS GEM Compliance

New Option:
SPA (Smart Probe and Alignment)
Monitoring the contact pressure of probe pins,
wafer chuck automatically align itself to probe card,
Auto-Tilting headstage

Basic Specifications:

Wafer Size 6″, 8″ & 12″ Wafers
Accuracy ±1.5µm
Card Changer 350mm – 480mm
Temperature Range -55 – +200°C (with Ambient Control)
Chuck Force 300kg
Index Time 200 msec. (5mm x 5mm x 0.5mm)

Auto Cassette Loader may be ordered in 3 different ways:
(1) Flat Top Loader
(2) Top Loader
(3) Dual FOUP Loader