TSK UF200 Spec Sheet
| Overall Accuracy | Within 4µm | |
| Wafer Size | 5″, 6″, 8″ | |
| X/Y Axes Probing Area Maximum Speed |
±120mm 200mm/s |
|
| Z axis Full Stroke Maximum Speed |
69mm 35ms/0.5mm Stroke |
|
| 0axis Rotation Range | ±5 dec. | |
| Fine Alignment | CCD ITV Image Processing | |
| Loader Cassette Mounts Wafter Handling |
1 (2nd cassette with option) Robot Arm / Backside Holding |
|
| Hard Disk | 3.5″ 540MB (1 unit standard) | |
| Floppy Disk | 3.5″ 2HD/2DD (1 unit standard) | |
| Display | 10.4″ TFT Color LCD | |
| Power Consumption | Approximately 1.5kVA | |
| Air Supply Source Pressure Consumption |
0.4 MPa or more Approximately 0.1 liters/wafer |
|
| Vacuum Supply | Less than 50kPa, 30 liters/minute | |
| Dimensions | 1090W x 1100° x 880H mm | |
| Weight | 800kg (Standard) |